@article{786931,
  author = {N Materer and R Goodman and S Leone},
  title = {Ion-enhanced etching of Si(100) with molecular chlorine: Neutral and ionic product yields as a function of ion kinetic energy and molecular chlorine flux},
  year = {2000},
  number = {104},
  month = {2000-01-01 00:01:00},
  publisher = {Journal of Physical Chemistry B},
  language = {en},
}