@article{786701,
  author = {L Sung and G Mulholland and Thomas Germer},
  title = {Polarization of Light Scattered by Particles on Silicon Wafers, ed. by J.C. Stover},
  year = {1999},
  number = {3619},
  month = {1999-01-01 00:01:00},
  publisher = {Surface Characterization for Computer Disks Wafers and Flat Panel Displays SPIE},
  language = {en},
}