@article{786626,
  author = {J Burnett and Zachary Levine and Eric Shirley},
  title = {Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography},
  year = {2002},
  month = {2002-01-01 00:01:00},
  publisher = {Semiconductor Fabtech 15<sup>th</sup>},
  language = {en},
}