@article{786621,
  author = {J Burnett and Simon Kaplan},
  title = {Measurement of the refractive index and thermo-optic coefficient of water near 193nm, ed. by A. Yen},
  year = {2003},
  number = {5040},
  month = {2003-01-01 00:01:00},
  publisher = {Optical Microlithography XVI Proc SPIE 5040},
  language = {en},
}