@article{786281,
  author = {J Burnett and Simon Kaplan and Eric Shirley and P Tompkins and J Webb},
  title = {High-index materials for 193 nm immersion lithography},
  year = {2005},
  number = {5754},
  month = {2005-01-01 00:01:00},
  publisher = {SPIE},
  language = {en},
}