@book{785481,
  author = {S Grantham and Charles Tarrio and Robert Vest and Thomas Lucatorto},
  title = {Metrology for EUVL Sources and Tools,ed. by V. Bakshi},
  year = {2006},
  month = {2006-01-01 00:01:00},
  publisher = { SPIE Press, Bellingham, WA},
  language = {en},
}