@article{784446,
  author = {R Goodman and N Materer and S Leone},
  title = {Ion-Enhanced Etching of Si(100) With Molecular Chlorine: Reaction Mechanisms and Product Yields},
  year = {1999},
  number = {17},
  month = {1999-12-01 00:12:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}