@article{784326,
  author = {M Edamura and Eric Benck and Yicheng Wang},
  title = {Time-Resolved Measurements of the E-to-H Mode Transition in Electronegative Pulse-Modulated Inductively Coupled Plasmas},
  year = {2021},
  month = {2021-10-12 15:10:24},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}