@article{784036,
  author = {M Edamura and Eric Benck},
  title = {Effects of Voltage Distribution Along an Induction Coil and Discharge Frequency in Inductively Coupled Plasmas},
  year = {2004},
  number = {22},
  month = {2004-04-01 00:04:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}