@article{783886,
  author = {B Ji and S Motika and P Badowski and S Dheandhanoo and C Timmons and D Hess and Eric Benck and Y Ye},
  title = {The Role of Fluorine Chemistry in Anisotropic Etching of Dielectric Materials},
  year = {2021},
  month = {2021-10-12 15:10:24},
  publisher = {Abstracts Of Papers Of The American Chemical Society},
  language = {en},
}