@article{783441,
  author = {Chengqing Wang and Wei-En Fu and Bin Li and Huai Huang and Christopher Soles and Eric Lin and Wen-Li Wu and Paul Ho and Michael Cresswell},
  title = {Small Angle X-Ray Scattering Measurements of Spatial Dependent Linewidth in Dense Nanoline Gratings},
  year = {2009},
  number = {517},
  month = {2009-03-16 00:03:00},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854130},
  language = {en},
}