@article{783256,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Daniel Fischer and S Sambasivan and Eric Lin and Ronald Jones and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {X-Ray Absorption Spectroscopy to Probe Interfacial Issues in Photolithography},
  year = {2003},
  number = {5039},
  month = {2003-02-01 00:02:00},
  publisher = {SPIE International Society for Optical Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852098},
  language = {en},
}