@conference{783076,
  author = {M Sahiner and J. Sarrao and M Carroll and C Magee and S Novak and Joseph Woicik},
  title = {XAFS as a Direct Local Structural Probe in Revealing the Effects of a C Presence in B Diffusion in SiGe Layers},
  year = {2021},
  month = {2021-10-12 15:10:24},
  publisher = {Proceedings for the MRS Spring Meeting, Undefined},
  language = {en},
}