@article{783066,
  author = {E Kondoh and M Baklanov and Eric Lin and D Gidley and A Nakashima},
  title = {Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-On-Glass Films Using Different Methods of Nondestructive Instrumentation},
  year = {2001},
  number = {40},
  month = {2001-04-01 00:04:00},
  publisher = {Japanese Journal of Applied Physics Part 2: Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851851},
  language = {en},
}