@article{782871,
  author = {R Farrow and Michael Postek and William Keery and Samuel Jones and J Lowney and M Blakey and L Fetter and A Liddle and L Hopkins and H Huggins and M Peabody and A Novembre and J Griffith},
  title = {Application of Trasmission Electron Detection to Scalpel Mask Metrology},
  year = {1997},
  number = {15},
  month = {1997-11-01 00:11:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}