@conference{782866,
  author = {B Park and J Choi and S Ahn and D Kim and L Joon and Ronald Dixson and Ndubuisi Orji and Joseph Fu and Theodore Vorburger},
  title = {Application of Carbon Nanotube Probes in a Critical Dimension Atomic Force Microscope},
  year = {2007},
  number = {6518},
  month = {2007-03-01 00:03:00},
  publisher = {Proceedings of SPIE, San Jose, CA, US},
  language = {en},
}