@article{782836,
  author = {R Koning and Ronald Dixson and Joseph Fu and Theodore Vorburger},
  title = {The Role of Periodic Interferometer Errors in the Calibration of Capacitance Displacement Sensors for Nanometrology Applications},
  year = {2000},
  number = {12},
  month = {2000-01-01 00:01:00},
  publisher = {Measurement Science & Technology},
  language = {en},
}