@conference{782646, author = {Y Chen and Alexana Roshko and Kristine Bertness and Dennis Readey and Marc Mansfield and M. Tan and A. Tandon}, title = {Comparison of AlGaAs oxidation in MBE and MOCVD grown samples}, year = {2002}, number = {692}, month = {2002-01-01 00:01:00}, publisher = {2002 Materials Research Society Symposium, Boston, MA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1962}, language = {en}, }