@article{782286,
  author = {Suresh Donthu and Nasim Alem and Zixlao Pan and Shu-you Li and Gajendra Shekhawat and Vinayak Dravid and Kurt Benkstein and Stephen Semancik},
  title = {Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-Electron Beam Lithography (soft-eBL)},
  year = {2008},
  number = {7},
  month = {2008-05-01 00:05:00},
  publisher = {IEEE Transactions on Nanotechnology},
  doi = {https://doi.org/10.1109/TNANO.2008.917793},
  language = {en},
}