@conference{781721,
  author = {Da-Wei Heh and Eric Vogel and J Bernstein},
  title = {Defect Generation in Ultra-thin Oxide Over Large Fluence Range},
  year = {2002},
  month = {2002-10-21 00:10:00},
  publisher = {Proc., IEEE International Integrated Reliability Workshop, Lake Tahoe, CA, USA},
  language = {en},
}