@misc{781411,
  author = {Joseph Kopanski and Erik Collart},
  title = {AVS Newsletter Conference Report USJ-2003: The Seventh International Workshop on: Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors},
  year = {2003},
  month = {2003-10-30 00:10:00},
  publisher = {American Vacuum Society Newsletter},
  language = {en},
}