@article{780201,
  author = {Jay Marchiando and Joseph Kopanski},
  title = {Regression Procedure for Determining the Dopant Profile in Semiconductors from Scanning Capacitance Microscopy Data},
  year = {2002},
  number = {92},
  month = {2002-11-15 00:11:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}