@article{780106,
  author = {James Olthoff and Yicheng Wang},
  title = {Studies of Ion Bombardment in High Density Plasmas Containing CF<sub>4</sub>},
  year = {1999},
  month = {1999-07-01 00:07:00},
  publisher = {Journal of Vacuum Science and Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=6462},
  language = {en},
}