@conference{779591,
  author = {Curt Richter and Nhan Nguyen and Joseph Dura and Charles Majkrzak},
  title = {Characterization of Thin SiO<sub>2</sub> on Si by Spectroscopic Ellipsometry, Neutron Reflectometry, and X-Ray Reflectometry},
  year = {1998},
  month = {1998-07-01 00:07:00},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}