@conference{779536, author = {Richard Allen and Rathindra Ghoshtagore}, title = {Evaluation of Surface Depletion Effects in Single-Crystal Test Structures for Reference Materials Applications}, year = {1998}, month = {1998-12-31 00:12:00}, publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA}, language = {en}, }