@conference{779056, author = {R. Champion and I. Dyakov and Yicheng Wang}, title = {Collisional Decomposition of SF6}, year = {2000}, month = {2000-09-01 00:09:00}, publisher = {Proc. XIII International Conference on Gas Discharges and Their Applications, Glasgow, 1, UK}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26344}, language = {en}, }