@misc{779021,
  author = {David Seiler and Thomas Shaffner},
  title = {International Workshop on Semiconductor Characterization: Present Status and Future Needs},
  year = {1995},
  month = {1995-11-01 00:11:00},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=27247},
  language = {en},
}