@conference{778996, author = {Alain Diebold and David Wollman and Kent Irwin and John Martinis and B. Liu}, title = {Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis}, year = {1998}, month = {1998-09-01 00:09:00}, publisher = {Proc., Fourth Intl. Symp. on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), Ostend, 1, SW}, language = {en}, }