@article{778881,
  author = {Donald Novotny},
  title = {Emission Spectra of a Diazide Photoresist Initiator and Exposure Reciprocity},
  year = {1988},
  number = {135},
  month = {1988-03-01 00:03:00},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}