@misc{778271,
  author = {Ya-Shian Li-Baboud and Brad Van Eck},
  title = {Semiconductor Factory and Equipment Time Synchronization},
  year = {2004},
  month = {2004-02-25 00:02:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}