@article{777911,
  author = {Michael Postek and Robert Larrabee and William Keery},
  title = {A New Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope},
  year = {1989},
  number = {36},
  month = {1989-11-01 00:11:00},
  publisher = {IEEE Transactions on Electron Devices},
  language = {en},
}