@misc{777726, author = {Stephen Knight and Joaquin Martinez and Barbara Belzer and Michele Buckley}, title = {Silicon Microelectronics Programs at the National Institute of Standards and Technology - Programs, Activities, and Accomplishments}, year = {2001}, month = {2001-04-06 00:04:00}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }