@article{777576,
  author = {Martin Misakian and Yicheng Wang},
  title = {Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach},
  year = {2000},
  number = {87},
  month = {2000-04-01 00:04:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=10504},
  language = {en},
}