@misc{776691, author = {Stephen Knight and A Settle-Raskin}, title = {The National Semiconductor Metrology Program, Project Portfolio, FY 1999}, year = {1999}, month = {1999-05-01 00:05:00}, publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD}, language = {en}, }