@conference{776396,
  author = {Richard Allen and O. Oyebanjo and Michael Cresswell and Loren Linholm},
  title = {Temperature Dependence of the Modulation of Electrical Llinewidth of Single-Crystal Critical Dimension Artifacts},
  year = {1998},
  month = {1998-03-01 00:03:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, 1, JA},
  language = {en},
}