@misc{776271,
  author = {W. Gladden and D. Baghdadi and S. Slaughter and William Duncan},
  title = {Semiconductor Measurement Technology: Automatic Determination of the Interstitial Oxygen Content of Silicon Wafers Polished on Both Sides},
  year = {1988},
  number = {400},
  month = {1988-12-01 00:12:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}