@conference{776241,
  author = {Duncan McBride and Joseph Kopanski},
  title = {Gate Oxide Formation under Mild Conditions for Scanning Capacitance Microscopy},
  year = {2001},
  month = {2001-02-01 00:02:00},
  publisher = {Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA},
  language = {en},
}