@conference{776171,
  author = {Linda Head and Harry Schafft},
  title = {An Evaluation of Electrical Linewidth Determination Using Cross-Bridge and Multi-Bridge Test Structures},
  year = {1999},
  month = {1999-12-31 00:12:00},
  publisher = {1999 IIEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA},
  language = {en},
}