@article{775931,
  author = {Robert Dragoset and Theodore Vorburger},
  title = {Scanning Tunneling Microscopy (STM) of a Diamond-turned Surface and a Grating Replica},
  year = {1987},
  number = {749},
  month = {1987-01-01 00:01:00},
  publisher = {SPIE, Metrology Figure and Finish},
  language = {en},
}