@book{775826,
  author = {David Read and Alex Volinsky},
  title = {Thin Films for Microelectronics and Photonics: Physics, Mechanics, Characterization, and Reliability},
  year = {2007},
  month = {2007-01-01 00:01:00},
  publisher = {Kluwer, },
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50201},
  language = {en},
}