@conference{775701, author = {Michael Postek and Marylyn Bennett and N Zaluzec}, title = {Telepresence: A New Paradigm for Industrial and Scientific Collaboration}, year = {1999}, number = {3677}, month = {1999-06-01 00:06:00}, publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA}, language = {en}, }