@conference{775661,
  author = {Nien Zhang and Michael Postek and Robert Larrabee},
  title = {Statistical Measure for the Sharpness of the SEM Image},
  year = {1997},
  number = {3050},
  month = {1997-07-01 00:07:00},
  publisher = {Proceedings of SPIE,Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA},
  language = {en},
}