@conference{775641,
  author = {Michael Postek and Andras Vladar and Nien Zhang and Robert Larrabee},
  title = {Potentials of On-Line Scanning Electron Microscope Performance Analysis Using NIST Reference Material 8091},
  year = {2000},
  number = {3998},
  month = {2000-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIV, Neal T. Sullivan, Editor, Santa Clara, CA, USA},
  language = {en},
}