@article{775111,
  author = {J. Bennett and John Dagata},
  title = {Ultrashallow Depth Profiling with Time-of-flight Secondary Ion Mass Spectrometry},
  year = {1994},
  number = {12(1)},
  month = {1994-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}