@conference{774321,
  author = {Hyeung-Sik Min and Albert Jones and Yuehwern Yih},
  title = {Toward a Real-time Scheduler and Controller for Semiconductor Fabrication Systems},
  year = {2003},
  month = {2003-04-01 00:04:00},
  publisher = {Proceedings of the International Conference on Product Research, , USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821979},
  language = {en},
}