@conference{773541,
  author = {Darryl Keenan and Holger Laabs and Shao Yang and Marla Dowell},
  title = {A 193 nm Laser Detector Nonlinearity Measurement System},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {Proc., Measurement Science Conference, Anaheim, CA, USA},
  language = {en},
}