@conference{773081,
  author = {Janet Cassard and Erik Secula and J Huang},
  title = {Round Robin for Standardization of MEMS Length and Strain Measurements},
  year = {2004},
  month = {2004-07-12 00:07:00},
  publisher = {SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, San Francisco, CA, USA},
  language = {en},
}