@article{772701,
  author = {Shigeo Tanuma and Cedric Powell and David Penn},
  title = {Dependence of inelastic electron mean free paths on electron energy and material},
  year = {1988},
  number = {A6},
  month = {1988-05-01 00:05:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}