@article{772551, author = {David Read and Robert Keller and Nicholas Barbosa and Roy Geiss}, title = {Results of a Nanoindentation Round Robin on Thin Film Copper on Silicon}, year = {2007}, month = {2007-01-01 00:01:00}, publisher = {Metal. Mater. Trans.}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50334}, language = {en}, }