@article{772346,
  author = {Michael Cresswell and Robert Allen and L Linholm and William Guthrie and William Penzes and A Gurnell},
  title = {Hybrid Optical-Electrical Overlay Test Structure},
  year = {1997},
  number = {10(2)},
  month = {1997-01-01 00:01:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}